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Fabrication of Patterned Polymer Resists for Ion Etching by Using Dewetting

  • Guang Lu
  • , Zhao Liang Cao
  • , Zhen Wu Lu
  • , Wei Li
  • , Ji Min Yao
  • , Gang Zhang
  • , Bai Yang
  • , Jia Cong Shen

Research output: Contribution to journal › Article › peer-review

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Material Science