TY - JOUR
T1 - Fabrication of silicon-based actuators using branched carbon nano-structures
AU - Darbari, Sara
AU - Abdi, Yaser
AU - Ebrahimi, Aida
AU - Mohajerzadeh, Shamsoddin
N1 - Funding Information:
Manuscript received October 02, 2010; accepted November 16, 2010. Date of publication December 03, 2010; date of current version May 18, 2011. This work has been supported with a grant from Research Council of the University of Tehran and Nano-Electronic Center of Excellence. The associate editor coordinating the review of this paper and approving it for publication was Prof. Boris Stoeber.
PY - 2011
Y1 - 2011
N2 - We report a novel interdigital sensor and actuator device based on branched tree-like carbon nanotubes (CNT) on silicon-based membranes with a high capacitance value. The presence of tree-like CNTs leads to a high overlap between interdigital fingers owing to their three dimensional nanometric features, hence increasing the value of the capacitance from 0.2 to 15 pF. The electromechanical behavior of the device has been investigated with monitoring capacitive characteristics of the sensor. An almost linear rise in the capacitance value by applying the external voltage is observed which could be due to the modulated overlapping between neighboring electrodes. The response of the sensor/actuator device to various frequencies has been studied.
AB - We report a novel interdigital sensor and actuator device based on branched tree-like carbon nanotubes (CNT) on silicon-based membranes with a high capacitance value. The presence of tree-like CNTs leads to a high overlap between interdigital fingers owing to their three dimensional nanometric features, hence increasing the value of the capacitance from 0.2 to 15 pF. The electromechanical behavior of the device has been investigated with monitoring capacitive characteristics of the sensor. An almost linear rise in the capacitance value by applying the external voltage is observed which could be due to the modulated overlapping between neighboring electrodes. The response of the sensor/actuator device to various frequencies has been studied.
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U2 - 10.1109/JSEN.2010.2096415
DO - 10.1109/JSEN.2010.2096415
M3 - Article
AN - SCOPUS:79957497148
SN - 1530-437X
VL - 11
SP - 1535
EP - 1540
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 7
M1 - 5657224
ER -