Abstract
The recording of three-dimensional periodic structures in a photosensitive polymer using a single diffraction element mask was reported. The central opening of the mask was surrounded by three diffraction gratings oriented 120° relative to one another such that the nondiffracted laser beam and the three first order diffracted beams give a 3D spatial light intensity pattern. It was found that masks with a 1.0 and 0.56 μm grating period, produce micron- and submicron-scale 3D features with good unifromity and definition over large substrate areas.
Original language | English (US) |
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Pages (from-to) | 1667-1669 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 11 |
DOIs | |
State | Published - Mar 17 2003 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)