Fabrication of TiO 2-organic hybrid dot arrays using nanosecond laser interference lithography

Hiroyo Segawa; Neal Abrams; Thomas E. Mallouk; Ivan Divliansky; Theresa S. Mayer

doi:10.1111/j.1551-2916.2006.01259.x

Fabrication of TiO ₂-organic hybrid dot arrays using nanosecond laser interference lithography

Hiroyo Segawa, Neal Abrams, Thomas E. Mallouk, Ivan Divliansky, Theresa S. Mayer

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Laser interference lithography is an established fabrication technique for periodic arrays such as photonic crystals (PCs). In this paper, we report the fabrication of a TiO ₂-organic hybrid periodic array by nanosecond laser interference lithography. TiO ₂-organic hybrid films were prepared from titanium tetra-n-butoxide and 2-(methacryloyloxy) ethyl acetoacetate (MEAcAc) by the sol-gel method. The films were irradiated by using 10 ns pulses of 355 nm diffracted light from a Nd:yttrium-aluminum-garnet laser. The complexes formed by the Ti alkoxide and the MEAcAc were decomposed by laser irradiation, and the irradiated parts remained as periodic dot arrays on the substrate after the development. The two-dimensional array of this TiO ₂-organic hybrid material was calcined at 450°C and formed an anatase TiO ₂ dot array. The refractive index measured was 2.00. These dots were crack free and adherent to the substrate.

Original language	English (US)
Pages (from-to)	3507-3510
Number of pages	4
Journal	Journal of the American Ceramic Society
Volume	89
Issue number	11
DOIs	https://doi.org/10.1111/j.1551-2916.2006.01259.x
State	Published - Nov 2006

All Science Journal Classification (ASJC) codes

Ceramics and Composites
Materials Chemistry

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10.1111/j.1551-2916.2006.01259.x

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title = "Fabrication of TiO 2-organic hybrid dot arrays using nanosecond laser interference lithography",

abstract = "Laser interference lithography is an established fabrication technique for periodic arrays such as photonic crystals (PCs). In this paper, we report the fabrication of a TiO 2-organic hybrid periodic array by nanosecond laser interference lithography. TiO 2-organic hybrid films were prepared from titanium tetra-n-butoxide and 2-(methacryloyloxy) ethyl acetoacetate (MEAcAc) by the sol-gel method. The films were irradiated by using 10 ns pulses of 355 nm diffracted light from a Nd:yttrium-aluminum-garnet laser. The complexes formed by the Ti alkoxide and the MEAcAc were decomposed by laser irradiation, and the irradiated parts remained as periodic dot arrays on the substrate after the development. The two-dimensional array of this TiO 2-organic hybrid material was calcined at 450°C and formed an anatase TiO 2 dot array. The refractive index measured was 2.00. These dots were crack free and adherent to the substrate.",

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AU - Segawa, Hiroyo

AU - Abrams, Neal

AU - Mallouk, Thomas E.

AU - Divliansky, Ivan

AU - Mayer, Theresa S.

PY - 2006/11

Y1 - 2006/11

N2 - Laser interference lithography is an established fabrication technique for periodic arrays such as photonic crystals (PCs). In this paper, we report the fabrication of a TiO 2-organic hybrid periodic array by nanosecond laser interference lithography. TiO 2-organic hybrid films were prepared from titanium tetra-n-butoxide and 2-(methacryloyloxy) ethyl acetoacetate (MEAcAc) by the sol-gel method. The films were irradiated by using 10 ns pulses of 355 nm diffracted light from a Nd:yttrium-aluminum-garnet laser. The complexes formed by the Ti alkoxide and the MEAcAc were decomposed by laser irradiation, and the irradiated parts remained as periodic dot arrays on the substrate after the development. The two-dimensional array of this TiO 2-organic hybrid material was calcined at 450°C and formed an anatase TiO 2 dot array. The refractive index measured was 2.00. These dots were crack free and adherent to the substrate.

AB - Laser interference lithography is an established fabrication technique for periodic arrays such as photonic crystals (PCs). In this paper, we report the fabrication of a TiO 2-organic hybrid periodic array by nanosecond laser interference lithography. TiO 2-organic hybrid films were prepared from titanium tetra-n-butoxide and 2-(methacryloyloxy) ethyl acetoacetate (MEAcAc) by the sol-gel method. The films were irradiated by using 10 ns pulses of 355 nm diffracted light from a Nd:yttrium-aluminum-garnet laser. The complexes formed by the Ti alkoxide and the MEAcAc were decomposed by laser irradiation, and the irradiated parts remained as periodic dot arrays on the substrate after the development. The two-dimensional array of this TiO 2-organic hybrid material was calcined at 450°C and formed an anatase TiO 2 dot array. The refractive index measured was 2.00. These dots were crack free and adherent to the substrate.

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Fabrication of TiO ₂-organic hybrid dot arrays using nanosecond laser interference lithography

Abstract

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