@article{e94598131a154c479bb1276814e5e069,
title = "Fabrication of topological insulator nanostructures",
author = "Mambakkam, {Sivakumar Vishnuvardhan} and Stephanie Law",
note = "Funding Information: S.V.M. and S.L. acknowledge funding from the National Science Foundation, Division of Materials Research under Award No. 1838504 and the Brookhaven National Laboratory/University of Delaware Seed Program under Award No. 20A00145. S.V.M. and S.L. acknowledge the use of the Materials Growth Facility (MGF) at the University of Delaware, which is partially supported by the National Science Foundation Major Research Instrumentation under Grant No. 1828141 and is a member of the Delaware Institute for Materials Research (DIMR).",
year = "2020",
month = sep,
day = "1",
doi = "10.1116/6.0000341",
language = "English (US)",
volume = "38",
journal = "Journal of Vacuum Science and Technology B",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
number = "5",
}