Facile fabrication of free standing submicron textured films of Parylene-C

A. Lakhtakia; L. Wei; A. Kumar; J. Kumar

doi:10.1179/143307511X12922272563464

Facile fabrication of free standing submicron textured films of Parylene-C

A. Lakhtakia, L. Wei, A. Kumar, J. Kumar

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Textured thin films of Parylene-C were deposited on polymethyl methacrylate coated glass slides. On immersion in chloroform, polymethyl methacrylate acted as the release agent for the Parylene- C thin films. This procedure yielded free standing films of Parylene-C that are ,<0.1 mm in thickness and have surface texture on at least the submicron length scale.

Original language	English (US)
Pages (from-to)	1-3
Number of pages	3
Journal	Materials Research Innovations
Volume	15
Issue number	1
DOIs	https://doi.org/10.1179/143307511X12922272563464
State	Published - Feb 2011

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1179/143307511X12922272563464

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@article{3881a61ac2b644a89de9b2c59dc294a2,

title = "Facile fabrication of free standing submicron textured films of Parylene-C",

abstract = "Textured thin films of Parylene-C were deposited on polymethyl methacrylate coated glass slides. On immersion in chloroform, polymethyl methacrylate acted as the release agent for the Parylene- C thin films. This procedure yielded free standing films of Parylene-C that are ,<0.1 mm in thickness and have surface texture on at least the submicron length scale.",

author = "A. Lakhtakia and L. Wei and A. Kumar and J. Kumar",

year = "2011",

month = feb,

doi = "10.1179/143307511X12922272563464",

language = "English (US)",

volume = "15",

pages = "1--3",

journal = "Materials Research Innovations",

issn = "1432-8917",

publisher = "Maney Publishing",

number = "1",

}

TY - JOUR

T1 - Facile fabrication of free standing submicron textured films of Parylene-C

AU - Lakhtakia, A.

AU - Wei, L.

AU - Kumar, A.

AU - Kumar, J.

PY - 2011/2

Y1 - 2011/2

N2 - Textured thin films of Parylene-C were deposited on polymethyl methacrylate coated glass slides. On immersion in chloroform, polymethyl methacrylate acted as the release agent for the Parylene- C thin films. This procedure yielded free standing films of Parylene-C that are ,<0.1 mm in thickness and have surface texture on at least the submicron length scale.

AB - Textured thin films of Parylene-C were deposited on polymethyl methacrylate coated glass slides. On immersion in chloroform, polymethyl methacrylate acted as the release agent for the Parylene- C thin films. This procedure yielded free standing films of Parylene-C that are ,<0.1 mm in thickness and have surface texture on at least the submicron length scale.

UR - http://www.scopus.com/inward/record.url?scp=79953127153&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79953127153&partnerID=8YFLogxK

U2 - 10.1179/143307511X12922272563464

DO - 10.1179/143307511X12922272563464

M3 - Article

AN - SCOPUS:79953127153

SN - 1432-8917

VL - 15

SP - 1

EP - 3

JO - Materials Research Innovations

JF - Materials Research Innovations

IS - 1

ER -

Facile fabrication of free standing submicron textured films of Parylene-C

Abstract

All Science Journal Classification (ASJC) codes

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