Abstract
Textured thin films of Parylene-C were deposited on polymethyl methacrylate coated glass slides. On immersion in chloroform, polymethyl methacrylate acted as the release agent for the Parylene- C thin films. This procedure yielded free standing films of Parylene-C that are ,<0.1 mm in thickness and have surface texture on at least the submicron length scale.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1-3 |
| Number of pages | 3 |
| Journal | Materials Research Innovations |
| Volume | 15 |
| Issue number | 1 |
| DOIs | |
| State | Published - Feb 2011 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering