TY - JOUR
T1 - Film deposition on particles trapped in the sheath of reactive dusty plasma
T2 - Effect of size distribution
AU - Matsoukas, Themis
AU - Cao, Jin
N1 - Funding Information:
Manuscript received August 15, 2003; revised December 4, 2003. This work was supported by the National Science Foundation under Grant CTS 9702653 and in part by DuPont.
PY - 2004/4
Y1 - 2004/4
N2 - We report our results on a radio-frequency plasma reactor used for thin-film deposition on particles. Deposition experiments in a reactive dusty plasma seeded with a bimodal distribution of seeds reveal that the mean film thickness is proportional to the deposition time. However, the deposition rate is not uniform for all particles. The distribution of deposition rates is obtained from measurements of the size distribution of the deposited films. The results show that the deposition rate exhibits a wide, approximately exponential distribution, which is attributed to spatial nonuniformities and gradients in the space between the electrodes. The conformity of the deposited films onto the surface of spherical seed particles is studied as a function of time. We find that the sphericity of the deposited film is generally good although deposition on the smallest seeds of this study (0.115 μm in radius) show a higher incidence of nonspherical coatings.
AB - We report our results on a radio-frequency plasma reactor used for thin-film deposition on particles. Deposition experiments in a reactive dusty plasma seeded with a bimodal distribution of seeds reveal that the mean film thickness is proportional to the deposition time. However, the deposition rate is not uniform for all particles. The distribution of deposition rates is obtained from measurements of the size distribution of the deposited films. The results show that the deposition rate exhibits a wide, approximately exponential distribution, which is attributed to spatial nonuniformities and gradients in the space between the electrodes. The conformity of the deposited films onto the surface of spherical seed particles is studied as a function of time. We find that the sphericity of the deposited film is generally good although deposition on the smallest seeds of this study (0.115 μm in radius) show a higher incidence of nonspherical coatings.
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U2 - 10.1109/TPS.2004.828447
DO - 10.1109/TPS.2004.828447
M3 - Article
AN - SCOPUS:4344620911
SN - 0093-3813
VL - 32
SP - 699
EP - 703
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
IS - 2 II
ER -