Abstract
We report the first observation of 29Si hyperfine spectra of the deep trapping center which dominates the electronic properties of silicon nitride films. Our results provide the first conclusive evidence that the center is a silicon "dangling bond" defect. Our results also demonstrate that the unpaired electron is highly localized (about 75%) on the central silicon and that the wave function is primarily p type.
Original language | English (US) |
---|---|
Pages (from-to) | 157-159 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 56 |
Issue number | 2 |
DOIs | |
State | Published - 1990 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)