@inproceedings{c91dce9bd0e34ce880eec54040b9ba1e,
title = "Flexible thin-film PZT ultrasonic transducers",
abstract = "We recently reported a transfer process that provides large area PZT (Pb(Zr0.52,i0.48)0.98O3) thin films released from a high temperature growth substrate to few micron thick flexible polyimide substrates [1]. The released films have superior piezoelectric properties compared to as-grown films due to declamping from the rigid substrate. In this work, we demonstrate ultrasonic transducers fabricated using released PZT films.",
author = "Tianning Liu and Kim, {Jeong Nyeon} and Trolier-Mckinstry, {Susan E.} and Jackson, {Thomas N.}",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 76th Device Research Conference, DRC 2018 ; Conference date: 24-06-2018 Through 27-06-2018",
year = "2018",
month = aug,
day = "20",
doi = "10.1109/DRC.2018.8442177",
language = "English (US)",
isbn = "9781538630280",
series = "Device Research Conference - Conference Digest, DRC",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 76th Device Research Conference, DRC 2018",
address = "United States",
}