Abstract
We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch–catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at −6 dB were measured by hydrophone.
Original language | English (US) |
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Article number | 1014 |
Pages (from-to) | 1-9 |
Number of pages | 9 |
Journal | Sensors (Switzerland) |
Volume | 21 |
Issue number | 3 |
DOIs | |
State | Published - Feb 1 2021 |
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Information Systems
- Atomic and Molecular Physics, and Optics
- Biochemistry
- Instrumentation
- Electrical and Electronic Engineering