TY - GEN
T1 - Flexoelectric materials and structures for M/NEMS
AU - Huang, Wenbin
AU - Kim, Kyungrim
AU - Zhang, Shujun
AU - Yuan, Fuh Gwo
AU - Jiang, Xiaoning
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - Recent research progress on flexoelectricity suggests that dramatic enhancement of effective piezoelectric properties desirable for advanced M/NEMS, in principle, is attainable through flexoelectric (FE) effect and scale effect. In this paper, the transverse flexoelectric coefficient μ12 of barium strontium titanate (BST) microcantilevers with thicknesses ranging from 1.4 mm down to 30 μm was measured at room temperature. It was found that μ12 remains to be constant (8.5 μC/m) for all fabricated microcantilevers. Effective piezoelectric coefficients of these microcantilevers were also calculated, indicating that significantly increased effective piezoelectric coefficients can be obtained from microcantilevers with thickness of microns and nanometers, which is promising for micro/nano electromechanical systems (M/NEMS).
AB - Recent research progress on flexoelectricity suggests that dramatic enhancement of effective piezoelectric properties desirable for advanced M/NEMS, in principle, is attainable through flexoelectric (FE) effect and scale effect. In this paper, the transverse flexoelectric coefficient μ12 of barium strontium titanate (BST) microcantilevers with thicknesses ranging from 1.4 mm down to 30 μm was measured at room temperature. It was found that μ12 remains to be constant (8.5 μC/m) for all fabricated microcantilevers. Effective piezoelectric coefficients of these microcantilevers were also calculated, indicating that significantly increased effective piezoelectric coefficients can be obtained from microcantilevers with thickness of microns and nanometers, which is promising for micro/nano electromechanical systems (M/NEMS).
UR - http://www.scopus.com/inward/record.url?scp=84869184660&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869184660&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84869184660
SN - 9780791854976
T3 - ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
SP - 761
EP - 765
BT - ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
T2 - ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
Y2 - 11 November 2011 through 17 November 2011
ER -