@inproceedings{6ccbb38f751247aab0b3bcd1fd2daaf4,
title = "Flexure-based, parallel nano-positioning robot",
author = "{Van Doren}, {Matthew J.} and William Dornfeld and Eric Marsh",
year = "2011",
language = "English (US)",
isbn = "9781887706582",
series = "Proceedings - ASPE 2011 Annual Meeting",
pages = "102--105",
booktitle = "Proceedings - ASPE 2011 Annual Meeting",
note = "26th Annual Meeting of the American Society for Precision Engineering, ASPE 2011 ; Conference date: 13-11-2011 Through 18-11-2011",
}