Focused ion beam irradiation effects on nanoscale freestanding thin films

Keyphrases

• Focused Ion Beam 100%
• Radiation Effects 100%
• Ion Beam Irradiation 100%
• Nanoscale Manipulation 25%
• Focused Ion Beam Technique 25%
• Aluminum Film 25%
• Stress Increment 25%
• Nanoscale Thin Films 25%
• Stress Gradient 25%
• Nanoscale Etching 25%
• High-power Ion Beam 25%
• Ion Beam Current 25%
• Surface Modification 25%
• Degradation Mechanism 25%
• Constant Acceleration 25%
• Exposure Effects 25%

Engineering

• Beam Irradiation 100%
• Focused Ion Beam 100%
• Upper Limit 50%
• Constant Acceleration 25%
• Degradation Mechanism 25%
• High Ion Energy 25%
• Stress Gradient 25%
• Exposure Effect 25%
• Aluminum Film 25%

Material Science

• Residual Stress 100%
• Focused Ion Beam 100%
• Surface Treatment 25%