Keyphrases
Heterostructure
100%
Si(111)
100%
Ion Implantation
100%
CoSi2
100%
Pd(II) Ions
100%
Suicide
40%
Single-crystalline
40%
Lattice Mismatch
40%
X Ray Diffraction
20%
Transmission Electron Microscopy
20%
Epitaxial
20%
Elastic Strain
20%
Rapid Thermal Annealing
20%
Rutherford Backscattering Spectrometry
20%
Optoelectronic Applications
20%
Threading Dislocation
20%
Misfit Dislocation
20%
Pd Distribution
20%
Microelectronics Applications
20%
Minimum Yield
20%
Silicide Layer
20%
Engineering
Heterostructures
100%
Ion Implantation
100%
Lattice Mismatch
50%
Transmissions
25%
Ray Diffraction
25%
Elastic Strain
25%
Microelectronics
25%
Optoelectronics
25%
Channelling
25%
Misfit Dislocation
25%
Rapid Thermal Annealing
25%
Silicon Metal
25%
Threading Dislocation
25%
Material Science
Heterojunction
100%
Ion Implantation
100%
Crystalline Material
75%
Lattice Mismatch
50%
X-Ray Diffraction
25%
Silicon
25%
Transmission Electron Microscopy
25%
Electrical Resistivity
25%
Annealing
25%
Silicide
25%
Rutherford Backscattering Spectrometry
25%