Fracture toughness characterization of advanced coatings

M. P. Manoharan, A. V. Desai, M. A. Haque

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


We present an experimental technique for the measurement of the fracture toughness of advanced surface coatings in situ in a scanning electron microscope. The technique is demonstrated on titanium-titanium nitride multi-layer thin films. Titanium-titanium nitride multi-layers are part of a new class of advanced erosion-resistant coatings with optimized toughness and hardness for performance and life respectively, and the fracture properties of these surface coatings determine their effectiveness. Thin film specimens were prepared using a lift-out technique in focused ion beam-scanning electron microscope. The fracture toughness of a 300 nm thick specimen perpendicular to the multi-layer thickness was measured to be 2.90 0.3 MPa m+1/2. The fracture characterization technique can be applied for a wide variety of surface coatings, and thin films in general.

Original languageEnglish (US)
Article number115004
JournalJournal of Micromechanics and Microengineering
Issue number11
StatePublished - 2009

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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