Frequency dependent electrical measurements of amorphous GeSbSe chalcogenide thin films

M. Mirsaneh, E. Furman, J. V. Ryan, M. T. Lanagan, C. G. Pantano

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A commercial bulk chalcogenide glass (Ge28 Sb12 Se60) was used as a source to fabricate amorphous thin films via thermal evaporation technique. At low frequencies (<1 MHz) impedance spectroscopy was performed to measure electrical properties. To measure ac conductivity at microwave frequencies, a split resonance cavity technique was applied for which a model based on parallel arrangement of substrate and film capacitors was developed. This model was used to extract tan δ and ac conductivity of the films. Microwave ac conductivity was correlated with the extrapolated low frequency conductivity data confirming applicability of the universal law commonly observed in amorphous semiconductors.

Original languageEnglish (US)
Article number112907
JournalApplied Physics Letters
Issue number11
StatePublished - 2010

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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