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Fully Transparent Epitaxial Oxide Thin-Film Transistor Fabricated at Back-End-of-Line Temperature by Suboxide Molecular-Beam Epitaxy

  • Felix V.E. Hensling
  • , Patrick Vogt
  • , Jisung Park
  • , Shun Li Shang
  • , Huacheng Ye
  • , Yu Mi Wu
  • , Kathleen Smith
  • , Veronica Show
  • , Kathy Azizie
  • , Hanjong Paik
  • , Debdeep Jena
  • , Huili G. Xing
  • , Y. Eren Suyolcu
  • , Peter A. van Aken
  • , Suman Datta
  • , Zi Kui Liu
  • , Darrell G. Schlom

Research output: Contribution to journal › Article › peer-review

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