Fundamental noise limits for miniature acoustic and vibration sensors

Engineering

• Thermal Noise 100%
• Fiber Optics 33%
• Design Process 33%
• Noise Analysis 33%
• Mechanical Loss 33%
• Microfabrication 33%
• Noise Floor 33%
• Design Guideline 33%
• Spectral Distribution 33%
• Electrical Noise 33%
• Vibration Measurement 33%

Keyphrases

• Vibration Sensor 100%
• Mechanical Noise 33%
• High-sensitivity Sensor 33%
• Complex Sensors 33%
• Noise Component 33%
• Optical Noise 33%
• Prototype Testing 33%

Material Science

• Fiber Optics 100%
• Microfabrication 100%