@inproceedings{023aa5dd15b04f8497a11f95ee0b5c93,
title = "Fundamentals and application of materials integration for lowpower piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS",
abstract = "Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to several projected MEMS/NEMS devices, particularly those that require materials with high Young's modulus for MEMS resonators or low surface adhesion forces for MEMS/NEMS working in conditions with extensive surface contact. Diamond films with superior mechanical/ tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD{\textregistered}) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.",
author = "O. Auciello and S. Srinivasan and J. Hiller and Sumant, {A. V.} and B. Kabius",
year = "2009",
doi = "10.1117/12.822798",
language = "English (US)",
isbn = "9780819475848",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Micro- and Nanotechnology Sensors, Systems, and Applications",
note = "Micro- and Nanotechnology Sensors, Systems, and Applications ; Conference date: 15-04-2009 Through 17-04-2009",
}