Fundamentals and application of materials integration for lowpower piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS

O. Auciello, S. Srinivasan, J. Hiller, A. V. Sumant, B. Kabius

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

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Material Science

Engineering

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