Gallium-induced milling of silicon: A computational investigation of focused ion beams

Keyphrases

• Gallium 100%
• Focused Ion Beam 100%
• Computational Investigation 100%
• Bombardment 50%
• Molecular Dynamics Simulation 50%
• Trench Formation 50%
• Milling Process 50%
• Incident Energy 50%
• Surface Material 50%
• Lateral Migration 50%
• Silicon Atom 50%
• Silicon Surface 50%
• V-shaped 50%
• Atomic Displacement 50%

Engineering

• Focused Ion Beam 100%
• Subsurface 50%
• Computer Simulation 50%
• Incident Energy 50%
• Early Stage 50%
• Surface Material 50%
• Silicon Atom 50%
• Silicon Surface 50%

Material Science

• Silicon 100%
• Focused Ion Beam 100%
• Gallium 100%