Gate-oxide grown on the sidewalls and base of a U-shaped Si trench: Effects of the oxide and oxide/Si interface condition on the properties of vertical MOS devices

S. A. Suliman, O. O. Awadelkarim, R. S. Ridley, G. M. Dolny

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Gate-oxide grown on the sidewalls and base of a U-shaped Si trench: Effects of the oxide and oxide/Si interface condition on the properties of vertical MOS devices'. Together they form a unique fingerprint.

Engineering

Keyphrases

Material Science