Generation of Microwave Capillary Argon Plasmas at Atmospheric Pressure

Kadek W. Hemawan, Derek W. Keefer, John V. Badding, Russell J. Hemley

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


A technique has been developed to generate stable Ar plasmas at atmospheric pressure inside of a quartz capillary tube. The microwave plasma in the capillary tube is produced by utilizing a single mode resonant circular cavity applicator with 2.45 GHz frequency excitation. The plasma can be confined or fully exposed outside the cavity as plasma jets depending on the operating conditions. The profile of the plasma front has been characterized as a conical tip or split branching jet plume. The measured discharge length and the power density of the plasma range from 6 to 10 cm and 35 to 75 W · cm-3, respectively. Addition of CH4 into the Ar plasma results in an increase in the abundances of excited CN and C2 carbon radicals and a concomitant decrease in the intensity of the Ar emission.

Original languageEnglish (US)
Article number7478151
Pages (from-to)2603-2607
Number of pages5
JournalIEEE Transactions on Plasma Science
Issue number11
StatePublished - Nov 2016

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Condensed Matter Physics


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