Abstract
In this paper we report on the existence, distribution, crystallographic orientation, size, and morphology of graphite crystallites within diamond films prepared by microwave plasma assisted chemical vapor deposition. Transmission electron microscopy and Raman spectroscopy techniques were used to characterize graphite formation in diamond films deposited under various conditions.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2315-2324 |
| Number of pages | 10 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 7 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 1989 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films