Growth kinetics and polytype stability in halide chemical vapor deposition of SiC

S. Nigam, H. J. Chung, S. W. Huh, J. Grim, A. Y. Polyakov, M. A. Fanton, B. Weiland, D. W. Snyder, M. Skowronski

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

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