Growth-microstructure-thermal property relations in AlN thin films

Yiwen Song, Chi Zhang, James Spencer Lundh, Hsien Lien Huang, Yue Zheng, Yingying Zhang, Mingyo Park, Timothy Mirabito, Rossiny Beaucejour, Chris Chae, Nathaniel McIlwaine, Giovanni Esteves, Thomas E. Beechem, Craig Moe, Rytis Dargis, Jeremy Jones, Jacob H. Leach, Robert M. Lavelle, David W. Snyder, Jon Paul MariaRoy H. Olsson, Joan M. Redwing, Azadeh Ansari, Jinwoo Hwang, Xiaojia Wang, Brian M. Foley, Susan E. Trolier-Mckinstry, Sukwon Choi

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Physics & Astronomy