Growth of high-quality Bi2Se3 topological insulators using (Bi1-xInx)2Se3 buffer layers

Yong Wang, Theresa P. Ginley, Stephanie Law

Research output: Contribution to journalArticlepeer-review

31 Scopus citations


In this article, the authors first report on the optimum growth parameters for (Bi1-xInx)2Se3 alloys of arbitrary composition using molecular beam epitaxy. It is found that smooth, single-phase films can only be obtained by using a sequential growth and annealing method to seed the film, after which normal codeposition growth can be used. The topological insulator Bi2Se3 is then grown on top of various (Bi1-xInx)2Se3 buffers and the electrical properties measured. For Bi2Se3 films grown on high-quality buffer layers, the mobility is greatly enhanced and the carrier density reduced compared to growth directly on sapphire substrates, indicating a significant improvement in film quality. The use of an almost lattice-matched trivially insulating buffer layer is therefore crucial to the growth of high-quality topological insulators on arbitrary substrates.

Original languageEnglish (US)
Article number02D101
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Issue number2
StatePublished - Mar 1 2018

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry


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