Hard and soft lead zirconate titanate thin films deposited on flat and curved surfaces by pulsed laser deposition

Johanna Lacey; Susan E. Trolier-McKinstry

Hard and soft lead zirconate titanate thin films deposited on flat and curved surfaces by pulsed laser deposition

Johanna Lacey, Susan E. Trolier-McKinstry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Lead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on flat surfaces and on fibers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constant and loss values of 1500 and 0.01 for soft films and 1100 and 0.03 for hard films have been achieved on flat Pt coated Si substrates with no observable difference in coercive fields. Remnant polarizations are typically 30 μC/cm² for both types of films. A fiber rotator has been designed and employed to deposit films on fibers 50 μm and larger.

Original language	English (US)
Title of host publication	IEEE International Symposium on Applications of Ferroelectrics
Editors	B.M. Kulwicki, A. Amin, A. Safari
Publisher	IEEE
Pages	687-690
Number of pages	4
Volume	2
State	Published - 1996
Event	Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) - East Brunswick, NJ, USA Duration: Aug 18 1996 → Aug 21 1996

Other

Other	Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2)
City	East Brunswick, NJ, USA
Period	8/18/96 → 8/21/96

All Science Journal Classification (ASJC) codes

Engineering(all)
Materials Science(all)

Cite this

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title = "Hard and soft lead zirconate titanate thin films deposited on flat and curved surfaces by pulsed laser deposition",

abstract = "Lead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on flat surfaces and on fibers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constant and loss values of 1500 and 0.01 for soft films and 1100 and 0.03 for hard films have been achieved on flat Pt coated Si substrates with no observable difference in coercive fields. Remnant polarizations are typically 30 μC/cm2 for both types of films. A fiber rotator has been designed and employed to deposit films on fibers 50 μm and larger.",

author = "Johanna Lacey and Trolier-McKinstry, {Susan E.}",

year = "1996",

language = "English (US)",

volume = "2",

pages = "687--690",

editor = "B.M. Kulwicki and A. Amin and A. Safari",

booktitle = "IEEE International Symposium on Applications of Ferroelectrics",

publisher = "IEEE",

note = "Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2) ; Conference date: 18-08-1996 Through 21-08-1996",

}

Lacey, J & Trolier-McKinstry, SE 1996, Hard and soft lead zirconate titanate thin films deposited on flat and curved surfaces by pulsed laser deposition. in BM Kulwicki, A Amin & A Safari (eds), IEEE International Symposium on Applications of Ferroelectrics. vol. 2, IEEE, pp. 687-690, Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2), East Brunswick, NJ, USA, 8/18/96.

Hard and soft lead zirconate titanate thin films deposited on flat and curved surfaces by pulsed laser deposition. / Lacey, Johanna; Trolier-McKinstry, Susan E.
IEEE International Symposium on Applications of Ferroelectrics. ed. / B.M. Kulwicki; A. Amin; A. Safari. Vol. 2 IEEE, 1996. p. 687-690.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Lacey, Johanna

AU - Trolier-McKinstry, Susan E.

PY - 1996

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N2 - Lead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on flat surfaces and on fibers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constant and loss values of 1500 and 0.01 for soft films and 1100 and 0.03 for hard films have been achieved on flat Pt coated Si substrates with no observable difference in coercive fields. Remnant polarizations are typically 30 μC/cm2 for both types of films. A fiber rotator has been designed and employed to deposit films on fibers 50 μm and larger.

AB - Lead zirconate titanate thin films offer considerably larger piezoelectric coefficients than do ZnO, and so are attractive for microelectromechanical sensors and actuators. To date, much of the research in this field has concentrated on undoped PZT. In this work, PZT films grown from both hard and soft PZT targets have been deposited on flat surfaces and on fibers by pulsed laser deposition so that the effect of doping on the properties can be determined. Dielectric constant and loss values of 1500 and 0.01 for soft films and 1100 and 0.03 for hard films have been achieved on flat Pt coated Si substrates with no observable difference in coercive fields. Remnant polarizations are typically 30 μC/cm2 for both types of films. A fiber rotator has been designed and employed to deposit films on fibers 50 μm and larger.

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AN - SCOPUS:0030359269

VL - 2

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BT - IEEE International Symposium on Applications of Ferroelectrics

A2 - Kulwicki, B.M.

A2 - Amin, A.

A2 - Safari, A.

PB - IEEE

T2 - Proceedings of the 1996 10th IEEE International Symposium on Applications of Ferroelectrics, ISAF. Part 1 (of 2)

Y2 - 18 August 1996 through 21 August 1996

ER -

Hard and soft lead zirconate titanate thin films deposited on flat and curved surfaces by pulsed laser deposition

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All Science Journal Classification (ASJC) codes

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