Abstract
Pentacene based thin film transistors (TFT), with high field-effect mobility and low threshold voltage and subthreshold slope, are fabricated using heavily doped silicon as substrate and gate electrode, with thermally grown silicon dioxide as the TFT gate dielectric. The fabricated organic TFTs with two types of source-drain contacts, namely, a top source-drain contact pentacene TFT with octadecyltrichlorosilane (OTS) deposited on the SiO2 gate dielectric before pentacene deposition and a pentacene TFT with pre-patterned source-drain contacts and OTS deposited prior to pentacene deposition, are studied. The ID-VDS characteristics, field-effect mobility, current on/off ratio, and subtreshold slope for the pentacene organic TFTs are presented.
Original language | English (US) |
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Title of host publication | Annual Device Research Conference Digest |
Publisher | IEEE |
Pages | 60-61 |
Number of pages | 2 |
State | Published - 1997 |
Event | Proceedings of the 1997 55th Annual Device Research Conference - Fort Collins, CO, USA Duration: Jun 23 1997 → Jun 25 1997 |
Other
Other | Proceedings of the 1997 55th Annual Device Research Conference |
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City | Fort Collins, CO, USA |
Period | 6/23/97 → 6/25/97 |
All Science Journal Classification (ASJC) codes
- General Engineering