Abstract
High performances of micromachined unimorph actuators (polymer micro-machined actuator or PMAT) based on the electrostrictive poly(vinylidede fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymer is developed. The PMAT exhibits a very high stroke level with high load capability, broad frequency range (>100kHz), and high displacement sensitivity. In addition, the simulated results, based on the properties of the materials and the structure of the device, are consisting with the experimental observation.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 917-920 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 2 |
| State | Published - 2001 |
| Event | 2001 Ultrasonics Symposium - Atlanta, GA, United States Duration: Oct 6 2001 → Oct 10 2001 |
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics