Abstract
Near atomically smooth, void-free, centimeter-long amorphous silicon waveguides are produced by high pressure chemical fluid deposition in the pores of a microstructured optical fiber template (right inset). Semiconductor waveguides fabricated by conventional deposition/fabrication approaches have a surface roughness that is a constraining factor in most optoelectronic devices, but these waveguides conform to the extraordinarily geometrically perfect optical fiber pores (DIC image, bottom inset).
Original language | English (US) |
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Pages (from-to) | 4605-4611 |
Number of pages | 7 |
Journal | Advanced Materials |
Volume | 22 |
Issue number | 41 |
DOIs | |
State | Published - Nov 2 2010 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering