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High-pressure chemical deposition for void-free filling of extreme aspect ratio templates
Justin R. Sparks, Neil F. Baril, Banafsheh Keshavarzi, Mahesh Krishnamurthi, Ivan Temnykh, Pier J.A. Sazio, Anna C. Peacock, Ali Borhan, Venkatraman Gopalan, John V. Badding
Research output: Contribution to journal › Article › peer-review
27
Scopus
citations