@inproceedings{fc493a17729d4e1482c072f46f747d0e,
title = "High quality machining of non-metals with a picosecond laser",
abstract = "Using a commercial picosecond laser system, experiments were performed to cleanly machine non-metals and measure material removal rates. The laser was operated at 532 and 355 nm using a unique pulse format and a galvo scanner to translate the beam. The test materials include quartz, sapphire, alumina ceramic, polytetrafluoroethylene (Teflon{\textregistered}) and silicon. The material removal is reported as both a depth per pass of the beam at a particular speed, and also a volumetric removal as a function of time. Scanning electron microscope pictures reveal the laser parameters that leave the sharpest edges, with minimal melt and debris.",
author = "Campbell, \{B. R.\} and Moore, \{J. A.\} and Lehecka, \{T. M.\} and Thomas, \{J. G.\} and Semak, \{V. V.\}",
year = "2009",
month = jan,
day = "1",
doi = "10.2351/1.5061668",
language = "English (US)",
isbn = "9780912035598",
series = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",
publisher = "Laser Institute of America",
pages = "937--941",
booktitle = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",
address = "United States",
note = "28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 ; Conference date: 02-11-2009 Through 05-11-2009",
}