TY - GEN
T1 - High temperature broadband BAW contact transducer
AU - Parks, David A.
AU - Tittmann, Bernhard R.
PY - 2007
Y1 - 2007
N2 - Aluminum nitride, AlN, point group 6mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AlN can be used as a contact BAW transducer up to 600 C. The upper limit was set by coupling as opposed to element failure and it is anticipated that AlN can be used at temperatures substantially beyond this range.
AB - Aluminum nitride, AlN, point group 6mm has shown much potential as a high temperature piezoelectric material for both SAW devices and BAW devices. The ability to grow large single crystals has facilitated interest in the material for such applications. It was shown in this report that AlN can be used as a contact BAW transducer up to 600 C. The upper limit was set by coupling as opposed to element failure and it is anticipated that AlN can be used at temperatures substantially beyond this range.
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U2 - 10.1109/ULTSYM.2007.601
DO - 10.1109/ULTSYM.2007.601
M3 - Conference contribution
AN - SCOPUS:48149101569
SN - 1424413834
SN - 9781424413836
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 2389
EP - 2392
BT - 2007 IEEE Ultrasonics Symposium Proceedings, IUS
T2 - 2007 IEEE Ultrasonics Symposium, IUS
Y2 - 28 October 2007 through 31 October 2007
ER -