Higher order modes excitation of electrostatically actuated clamped-clamped microbeams: Experimental and analytical investigation

Keyphrases

• Loading Conditions 100%
• Vibration Mode 100%
• Higher Order Mode 100%
• Analytical Investigation 100%
• Electrostatically Actuated 100%
• Frequency Sweep 50%
• Analytical Model 50%
• Electrode Configuration 50%
• Resonant Amplitude 50%
• Vibration Amplitude 50%
• Galerkin Method 50%
• High Amplitude 50%
• Leonhard Euler 50%
• Gold Layer 50%
• Polyimide 50%
• Beam Model 50%
• Chrome 50%
• Structural Layers 50%
• Second Mode 50%
• Zero Responses 50%
• Strong Excitation 50%
• Electrical Loading 50%
• Mode Resonance 50%

Engineering

• Loading Condition 100%
• Vibration Mode 100%
• Simulation Result 50%
• Analytical Model 50%
• Good Agreement 50%
• Resonator 50%
• Beam Model 50%
• Resonance Mode 50%
• Sweep Frequency 50%

Material Science

• Resonator 100%
• Polyimide 100%