Keyphrases
Thin Film Growth
100%
Dielectric Properties
100%
Lead Zirconate Titanate
100%
Highly Oriented
100%
Zirconium Titanate Thin Films
100%
Growth Control
100%
PZT Film
66%
Heating Rate
66%
Texture Evolution
66%
RF Magnetron Sputtering
33%
Ferroelectric Properties
33%
Oriented Films
33%
Two-parameter
33%
Annealing
33%
Crystal Orientation
33%
PZT Thin Films
33%
Crystallization Kinetics
33%
Post Deposition
33%
Oxygen Partial Pressure
33%
Evolution Mechanism
33%
Deposition Parameters
33%
Compositional Evolution
33%
Film Composition
33%
Metallic Target
33%
Engineering
Dielectrics
100%
Heating Rate
100%
Thin Film Growth
100%
Zirconium Titanate
100%
Texture Evolution
100%
Thin Films
50%
Flow Rate
50%
Partial Pressure
50%
Magnetron
50%
Oxygen (O2)
50%
Deposition Parameter
50%
Material Science
Film
100%
Thin Film Growth
100%
Dielectric Property
100%
Zirconium Titanate
100%
Thin Films
25%
Magnetron Sputtering
25%
Ferroelectricity
25%
Crystal Orientation
25%
Crystallization Kinetics
25%