HRTEM study of Al2O3 barriers in Co81Pt19/Co/Al-Al2O3/Ni80Fe20 spin dependent tunneling junctions

Trevor Clark, Jean F. Bobo, Fred Mancoff, Kyusik Sin, Shan Wang, Bruce Clemens, Robert Sinclair

Research output: Contribution to journalConference articlepeer-review


The insulating barriers in Al2O3 are directly measured using cross sectional High Resolution Transmission Electron Microscopy (HRTEM). It is shown how the thickness of an Al2O3 barrier varies with plasma oxidation time for a Co81Pt19/Co/Al-Al2O3/Ni80Fe20 tunneling junction. An example is also given on how the oxidation rate may be reduced significantly by changing the oxygen plasma conditions.

Original languageEnglish (US)
Pages (from-to)BR-07
JournalDigests of the Intermag Conference
StatePublished - 1999
EventProceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea
Duration: May 18 1999May 21 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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