Abstract
The insulating barriers in Al2O3 are directly measured using cross sectional High Resolution Transmission Electron Microscopy (HRTEM). It is shown how the thickness of an Al2O3 barrier varies with plasma oxidation time for a Co81Pt19/Co/Al-Al2O3/Ni80Fe20 tunneling junction. An example is also given on how the oxidation rate may be reduced significantly by changing the oxygen plasma conditions.
Original language | English (US) |
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Pages (from-to) | BR-07 |
Journal | Digests of the Intermag Conference |
State | Published - 1999 |
Event | Proceedings of the 1999 IEEE International Magnetics Conference 'Digest of Intermag 99' - Kyongju, South Korea Duration: May 18 1999 → May 21 1999 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films