Hybrid approaches to nanolithography: Photolithographic structures with precise, controllable nanometer-scale spacings created by molecular rulers

Mary E. Anderson, Morgan Mihok, Hirofumi Tanaka, Lim Piu Tan, Mark W. Horn, Gregory S. McCarty, Paul S. Weiss

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Fingerprint

Dive into the research topics of 'Hybrid approaches to nanolithography: Photolithographic structures with precise, controllable nanometer-scale spacings created by molecular rulers'. Together they form a unique fingerprint.

Engineering

Keyphrases