Skip to main navigation Skip to search Skip to main content

Hydrogen-enhanced transformation of electrical and structural properties of thin subsurface ion implanted silicon layer in SiO2-Si systems

  • E. I. Terukov
  • , B. J. Ber
  • , V. Kh Kudojarova
  • , V. Ju Davydov
  • , A. N. Nazarov
  • , Ja N. Vovk
  • , S. Ashok

Research output: Contribution to journal › Conference article › peer-review

Fingerprint

Dive into the research topics of 'Hydrogen-enhanced transformation of electrical and structural properties of thin subsurface ion implanted silicon layer in SiO2-Si systems'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science

Medicine and Dentistry