Hydrogen-enhanced transformation of electrical and structural properties of thin subsurface ion implanted silicon layer in SiO2-Si systems

E. I. Terukov, B. J. Ber, V. Kh Kudojarova, V. Ju Davydov, A. N. Nazarov, Ja N. Vovk, S. Ashok

Research output: Contribution to journal › Conference article › peer-review

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Medicine and Dentistry