Hydrogen in silicon: Defect interactions and applications

Keyphrases

• Silicon Defects 100%
• Si MOSFET 50%
• Hot Carrier Reliability 50%
• Transient Diffusion 50%
• Thermal Donors 50%
• Hydrogen Plasma Treatment 50%
• Thermal Budget 50%
• Bulk Defects 50%
• Interface Defect Passivation 50%

Material Science

• Silicon 100%
• Crystalline Material 66%
• Oxide Compound 33%
• Sintering 33%
• Doping (Additives) 33%
• Deuterium 33%
• Metal-Oxide-Semiconductor Field-Effect Transistor 33%
• Hot Carrier 33%
• Gettering 33%