Hydrogen sensors: Role of palladium thin film morphology

J. RaviPrakash; A. H. McDaniel; M. Horn; L. Pilione; P. Sunal; R. Messier; R. T. McGrath; F. K. Schweighardt

doi:10.1016/j.snb.2006.02.050

Hydrogen sensors: Role of palladium thin film morphology

J. RaviPrakash, A. H. McDaniel, M. Horn, L. Pilione, P. Sunal, R. Messier, R. T. McGrath, F. K. Schweighardt

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75 Scopus citations

Abstract

The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering under different gas pressures. Palladium thin film morphology was found to strongly influence sensor response in terms of hydrogen sensitivity and rate of response. In dense columnar Pd films, CO dramatically increases the time-lag in sensor response to H₂ in H₂/CO mixtures. However, the steady state value of the response remains unchanged. Films with a void filled columnar morphology exhibited shorter time-lag in response to H₂ in presence of CO.

Original language	English (US)
Pages (from-to)	439-446
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	120
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2006.02.050
State	Published - Jan 10 2007

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2006.02.050

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title = "Hydrogen sensors: Role of palladium thin film morphology",

abstract = "The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering under different gas pressures. Palladium thin film morphology was found to strongly influence sensor response in terms of hydrogen sensitivity and rate of response. In dense columnar Pd films, CO dramatically increases the time-lag in sensor response to H2 in H2/CO mixtures. However, the steady state value of the response remains unchanged. Films with a void filled columnar morphology exhibited shorter time-lag in response to H2 in presence of CO.",

author = "J. RaviPrakash and McDaniel, {A. H.} and M. Horn and L. Pilione and P. Sunal and R. Messier and McGrath, {R. T.} and Schweighardt, {F. K.}",

note = "Funding Information: The authors would like to thank Dennis Morrison (Sandia National Labs, CA) for building the flow chamber for sensor characterization and Mark Angalone (Materials Research Institute, Penn State University) for performing X-ray diffraction on the samples. The authors would also like to thank William Drawl (Materials Research Institute, Penn State University) for his assistance in setting up and maintaining process tools at Penn State. This work was supported by Office of Industrial Technology (OIT) under Department of Energy (DOE), United States Government.",

year = "2007",

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doi = "10.1016/j.snb.2006.02.050",

language = "English (US)",

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T2 - Role of palladium thin film morphology

AU - RaviPrakash, J.

AU - McDaniel, A. H.

AU - Horn, M.

AU - Pilione, L.

AU - Sunal, P.

AU - Messier, R.

AU - McGrath, R. T.

AU - Schweighardt, F. K.

N1 - Funding Information: The authors would like to thank Dennis Morrison (Sandia National Labs, CA) for building the flow chamber for sensor characterization and Mark Angalone (Materials Research Institute, Penn State University) for performing X-ray diffraction on the samples. The authors would also like to thank William Drawl (Materials Research Institute, Penn State University) for his assistance in setting up and maintaining process tools at Penn State. This work was supported by Office of Industrial Technology (OIT) under Department of Energy (DOE), United States Government.

PY - 2007/1/10

Y1 - 2007/1/10

N2 - The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering under different gas pressures. Palladium thin film morphology was found to strongly influence sensor response in terms of hydrogen sensitivity and rate of response. In dense columnar Pd films, CO dramatically increases the time-lag in sensor response to H2 in H2/CO mixtures. However, the steady state value of the response remains unchanged. Films with a void filled columnar morphology exhibited shorter time-lag in response to H2 in presence of CO.

AB - The effect of thin film morphology, carbon monoxide (CO) and resistor geometry on the response of hydrogen sensitive thin film palladium resistors has been investigated. Films with two different morphologies were fabricated by DC magnetron sputtering under different gas pressures. Palladium thin film morphology was found to strongly influence sensor response in terms of hydrogen sensitivity and rate of response. In dense columnar Pd films, CO dramatically increases the time-lag in sensor response to H2 in H2/CO mixtures. However, the steady state value of the response remains unchanged. Films with a void filled columnar morphology exhibited shorter time-lag in response to H2 in presence of CO.

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JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 2

ER -

Hydrogen sensors: Role of palladium thin film morphology

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All Science Journal Classification (ASJC) codes

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