Hyperthermal oxygen interacting with silicon surfaces: Adsorption, implantation, and damage creation

Keyphrases

• Surface Damage 100%
• Silicon Surface 100%
• Hyperthermal 100%
• Surface Adsorption 100%
• Impact Energy 100%
• Low Energy 33%
• Knock-in Mouse Model 33%
• Bombardment 33%
• Device Performance 33%
• Si(111) 33%
• Molecular Oxygen 33%
• Photovoltaic Devices 33%
• Microelectronics 33%
• Probability Distribution 33%
• Reactive Molecular Dynamics 33%
• Atomic Oxygen 33%
• Defect Formation 33%
• Energy Defect 33%
• Chemisorption Process 33%
• Low Impact 33%
• Single Impact 33%
• Silica-based 33%

Engineering

• Silicon Surface 100%
• Impact Energy 100%
• Photovoltaics 33%
• Bombardment 33%
• Device Performance 33%
• Microelectronics 33%
• Energy Defect 33%
• Single Impact 33%

Material Science

• Silicon 100%
• Photovoltaics 50%
• Silicon Dioxide 50%
• Chemisorption 50%