Identification of macroscopic process observables for thin-film growth

Amit Varshney; Antonios Armaou

doi:10.1109/cdc.2006.377248

Identification of macroscopic process observables for thin-film growth

Amit Varshney, Antonios Armaou

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We identify a minimum set of "coarse" spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit approximately identical "coarse" dynamic behavior. These parameters can be subsequently employed to develop low-order state-space models for controller synthesis and optimization as an alternative to computationally expensive kMC simulations.

Original language	English (US)
Title of host publication	Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	2140-2146
Number of pages	7
ISBN (Print)	1424401712, 9781424401710
DOIs	https://doi.org/10.1109/cdc.2006.377248
State	Published - 2006
Event	45th IEEE Conference on Decision and Control 2006, CDC - San Diego, CA, United States Duration: Dec 13 2006 → Dec 15 2006

Publication series

Name	Proceedings of the IEEE Conference on Decision and Control
ISSN (Print)	0743-1546
ISSN (Electronic)	2576-2370

Other

Other	45th IEEE Conference on Decision and Control 2006, CDC
Country/Territory	United States
City	San Diego, CA
Period	12/13/06 → 12/15/06

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Modeling and Simulation
Control and Optimization

Access to Document

10.1109/cdc.2006.377248

Cite this

Varshney, A., & Armaou, A. (2006). Identification of macroscopic process observables for thin-film growth. In Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC (pp. 2140-2146). Article 4177740 (Proceedings of the IEEE Conference on Decision and Control). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/cdc.2006.377248

@inproceedings{ffa98e5a9d234e82b713a2f8081df5e1,

title = "Identification of macroscopic process observables for thin-film growth",

abstract = "We identify a minimum set of {"}coarse{"} spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit approximately identical {"}coarse{"} dynamic behavior. These parameters can be subsequently employed to develop low-order state-space models for controller synthesis and optimization as an alternative to computationally expensive kMC simulations.",

author = "Amit Varshney and Antonios Armaou",

year = "2006",

doi = "10.1109/cdc.2006.377248",

language = "English (US)",

isbn = "1424401712",

series = "Proceedings of the IEEE Conference on Decision and Control",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "2140--2146",

booktitle = "Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC",

address = "United States",

note = "45th IEEE Conference on Decision and Control 2006, CDC ; Conference date: 13-12-2006 Through 15-12-2006",

}

Varshney, A & Armaou, A 2006, Identification of macroscopic process observables for thin-film growth. in Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC., 4177740, Proceedings of the IEEE Conference on Decision and Control, Institute of Electrical and Electronics Engineers Inc., pp. 2140-2146, 45th IEEE Conference on Decision and Control 2006, CDC, San Diego, CA, United States, 12/13/06. https://doi.org/10.1109/cdc.2006.377248

Identification of macroscopic process observables for thin-film growth. / Varshney, Amit; Armaou, Antonios.
Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC. Institute of Electrical and Electronics Engineers Inc., 2006. p. 2140-2146 4177740 (Proceedings of the IEEE Conference on Decision and Control).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Identification of macroscopic process observables for thin-film growth

AU - Varshney, Amit

AU - Armaou, Antonios

PY - 2006

Y1 - 2006

N2 - We identify a minimum set of "coarse" spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit approximately identical "coarse" dynamic behavior. These parameters can be subsequently employed to develop low-order state-space models for controller synthesis and optimization as an alternative to computationally expensive kMC simulations.

AB - We identify a minimum set of "coarse" spatially invariant parameters that accurately describe the dominant behavior of the deposition surface during thin-film growth under adsorption and surface diffusion. We demonstrate, through kMC simulations, that different deposition surfaces constructed through a stochastic reconstruction procedure, with identical values for these parameters, exhibit approximately identical "coarse" dynamic behavior. These parameters can be subsequently employed to develop low-order state-space models for controller synthesis and optimization as an alternative to computationally expensive kMC simulations.

UR - http://www.scopus.com/inward/record.url?scp=39649121876&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=39649121876&partnerID=8YFLogxK

U2 - 10.1109/cdc.2006.377248

DO - 10.1109/cdc.2006.377248

M3 - Conference contribution

AN - SCOPUS:39649121876

SN - 1424401712

SN - 9781424401710

T3 - Proceedings of the IEEE Conference on Decision and Control

SP - 2140

EP - 2146

BT - Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 45th IEEE Conference on Decision and Control 2006, CDC

Y2 - 13 December 2006 through 15 December 2006

ER -

Identification of macroscopic process observables for thin-film growth

Abstract

Publication series

Other

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this