Impact of changes in the Pt heterostructure bottom electrodes on the ferroelectric properties of SBT thin films

Keyphrases

• Heterostructure 100%
• Ferroelectric Properties 100%
• Remanent Polarization 100%
• Bottom Electrode 100%
• Leakage Current Density 100%
• Change Impact 100%
• In Films 50%
• Crystallinity 50%
• Microstructure 50%
• Si Substrate 50%
• Surface Roughness 50%
• Low Voltage 50%
• Annealing Temperature 50%
• Electrode-electrolyte Interface 50%
• TiO2-SiO2 50%
• Pt-TiO2 50%
• Interface Roughness 50%
• Electrode Surface 50%
• Electrode Roughness 50%
• Polarization Current 50%
• Film Electrode 50%
• ZrO2-SiO2 50%
• Out-diffusion 50%
• Film Orientation 50%
• Low Leakage Current 50%
• Current Density-voltage 50%

Material Science

• Film 100%
• Thin Films 100%
• Heterojunction 100%
• Ferroelectricity 100%
• Density 40%
• Surface Roughness 20%
• Zirconia 20%
• Titanium Dioxide 20%

Engineering

• Thin Films 100%
• Heterojunctions 100%
• Crystallinity 50%
• Si Substrate 50%
• Annealing Temperature 50%
• Film Orientation 50%