Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering

Samantha T. Jaszewski; Eric R. Hoglund; Anna Costine; Marc H. Weber; Shelby S. Fields; Maria Gabriela Sales; Jaykumar Vaidya; Leah Bellcase; Katie Loughlin; Alejandro Salanova; Diane A. Dickie; Steven L. Wolfley; M. David Henry; Jon Paul Maria; Jacob L. Jones; Nikhil Shukla; Stephen J. McDonnell; Petra Reinke; Patrick E. Hopkins; James M. Howe; Jon F. Ihlefeld

doi:10.1016/j.actamat.2022.118220

Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering

Samantha T. Jaszewski, Eric R. Hoglund, Anna Costine, Marc H. Weber, Shelby S. Fields, Maria Gabriela Sales, Jaykumar Vaidya, Leah Bellcase, Katie Loughlin, Alejandro Salanova, Diane A. Dickie, Steven L. Wolfley, M. David Henry, Jon Paul Maria, Jacob L. Jones, Nikhil Shukla, Stephen J. McDonnell, Petra Reinke, Patrick E. Hopkins, James M. HoweJon F. Ihlefeld

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34 Scopus citations

Original language	English (US)
Article number	118220
Journal	Acta Materialia
Volume	239
DOIs	https://doi.org/10.1016/j.actamat.2022.118220
State	Published - Oct 15 2022

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Polymers and Plastics
Metals and Alloys

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10.1016/j.actamat.2022.118220

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Jaszewski, S. T., Hoglund, E. R., Costine, A., Weber, M. H., Fields, S. S., Sales, M. G., Vaidya, J., Bellcase, L., Loughlin, K., Salanova, A., Dickie, D. A., Wolfley, S. L., Henry, M. D., Maria, J. P., Jones, J. L., Shukla, N., McDonnell, S. J., Reinke, P., Hopkins, P. E., ... Ihlefeld, J. F. (2022). Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering. Acta Materialia, 239, Article 118220. https://doi.org/10.1016/j.actamat.2022.118220

@article{72a54843a83d4a029939f577b3d860e7,

title = "Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering",

author = "Jaszewski, \{Samantha T.\} and Hoglund, \{Eric R.\} and Anna Costine and Weber, \{Marc H.\} and Fields, \{Shelby S.\} and Sales, \{Maria Gabriela\} and Jaykumar Vaidya and Leah Bellcase and Katie Loughlin and Alejandro Salanova and Dickie, \{Diane A.\} and Wolfley, \{Steven L.\} and Henry, \{M. David\} and Maria, \{Jon Paul\} and Jones, \{Jacob L.\} and Nikhil Shukla and McDonnell, \{Stephen J.\} and Petra Reinke and Hopkins, \{Patrick E.\} and Howe, \{James M.\} and Ihlefeld, \{Jon F.\}",

note = "Funding Information: This work was supported by the Semiconductor Research Corporation (SRC) within the Nanomanufacturing, Materials, and Processes (NMP) Program under task 2875.001. S.T.J. acknowledges support from the U.S. National Science Foundation's Graduate Research Fellowship Program under grant DGE-1842490. E.R.H. and P.E.H. appreciate support from the Army Research Office , Grant No. W911NF-16-1-0406 . The XPS instrument acquisition (Reinke group) was supported by a DURIP award ( Office of Naval Research ) Grant N00014-16-1-2842 , program manager Dr. David Shifler. This work was performed, in part, at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-2025064 ). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI). Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-NA0003525 . This paper describes objective technical results and analysis. Any subjective views or opinions that might be expressed in the paper do not necessarily represent the views of the U.S. Department of Energy or the United States Government. ",

year = "2022",

month = oct,

day = "15",

doi = "10.1016/j.actamat.2022.118220",

language = "English (US)",

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journal = "Acta Materialia",

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Jaszewski, ST, Hoglund, ER, Costine, A, Weber, MH, Fields, SS, Sales, MG, Vaidya, J, Bellcase, L, Loughlin, K, Salanova, A, Dickie, DA, Wolfley, SL, Henry, MD, Maria, JP, Jones, JL, Shukla, N, McDonnell, SJ, Reinke, P, Hopkins, PE, Howe, JM & Ihlefeld, JF 2022, 'Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering', Acta Materialia, vol. 239, 118220. https://doi.org/10.1016/j.actamat.2022.118220

TY - JOUR

T1 - Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering

AU - Jaszewski, Samantha T.

AU - Hoglund, Eric R.

AU - Costine, Anna

AU - Weber, Marc H.

AU - Fields, Shelby S.

AU - Sales, Maria Gabriela

AU - Vaidya, Jaykumar

AU - Bellcase, Leah

AU - Loughlin, Katie

AU - Salanova, Alejandro

AU - Dickie, Diane A.

AU - Wolfley, Steven L.

AU - Henry, M. David

AU - Maria, Jon Paul

AU - Jones, Jacob L.

AU - Shukla, Nikhil

AU - McDonnell, Stephen J.

AU - Reinke, Petra

AU - Hopkins, Patrick E.

AU - Howe, James M.

AU - Ihlefeld, Jon F.

N1 - Funding Information: This work was supported by the Semiconductor Research Corporation (SRC) within the Nanomanufacturing, Materials, and Processes (NMP) Program under task 2875.001. S.T.J. acknowledges support from the U.S. National Science Foundation's Graduate Research Fellowship Program under grant DGE-1842490. E.R.H. and P.E.H. appreciate support from the Army Research Office , Grant No. W911NF-16-1-0406 . The XPS instrument acquisition (Reinke group) was supported by a DURIP award ( Office of Naval Research ) Grant N00014-16-1-2842 , program manager Dr. David Shifler. This work was performed, in part, at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-2025064 ). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI). Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-NA0003525 . This paper describes objective technical results and analysis. Any subjective views or opinions that might be expressed in the paper do not necessarily represent the views of the U.S. Department of Energy or the United States Government.

PY - 2022/10/15

Y1 - 2022/10/15

UR - https://www.scopus.com/pages/publications/85135871975

UR - https://www.scopus.com/inward/citedby.url?scp=85135871975&partnerID=8YFLogxK

U2 - 10.1016/j.actamat.2022.118220

DO - 10.1016/j.actamat.2022.118220

M3 - Article

AN - SCOPUS:85135871975

SN - 1359-6454

VL - 239

JO - Acta Materialia

JF - Acta Materialia

M1 - 118220

ER -

Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering

All Science Journal Classification (ASJC) codes

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