@article{72a54843a83d4a029939f577b3d860e7,
title = "Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering",
author = "Jaszewski, \{Samantha T.\} and Hoglund, \{Eric R.\} and Anna Costine and Weber, \{Marc H.\} and Fields, \{Shelby S.\} and Sales, \{Maria Gabriela\} and Jaykumar Vaidya and Leah Bellcase and Katie Loughlin and Alejandro Salanova and Dickie, \{Diane A.\} and Wolfley, \{Steven L.\} and Henry, \{M. David\} and Maria, \{Jon Paul\} and Jones, \{Jacob L.\} and Nikhil Shukla and McDonnell, \{Stephen J.\} and Petra Reinke and Hopkins, \{Patrick E.\} and Howe, \{James M.\} and Ihlefeld, \{Jon F.\}",
note = "Funding Information: This work was supported by the Semiconductor Research Corporation (SRC) within the Nanomanufacturing, Materials, and Processes (NMP) Program under task 2875.001. S.T.J. acknowledges support from the U.S. National Science Foundation's Graduate Research Fellowship Program under grant DGE-1842490. E.R.H. and P.E.H. appreciate support from the Army Research Office , Grant No. W911NF-16-1-0406 . The XPS instrument acquisition (Reinke group) was supported by a DURIP award ( Office of Naval Research ) Grant N00014-16-1-2842 , program manager Dr. David Shifler. This work was performed, in part, at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-2025064 ). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI). Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-NA0003525 . This paper describes objective technical results and analysis. Any subjective views or opinions that might be expressed in the paper do not necessarily represent the views of the U.S. Department of Energy or the United States Government. ",
year = "2022",
month = oct,
day = "15",
doi = "10.1016/j.actamat.2022.118220",
language = "English (US)",
volume = "239",
journal = "Acta Materialia",
issn = "1359-6454",
publisher = "Acta Materialia Inc",
}