Keyphrases
PZT Thin Films
100%
Processing Conditions
100%
Solution Chemistry
100%
Copper Substrate
100%
Sol-gel PZT
100%
Copper Surface
100%
Acetic Acid
66%
Base Metals
66%
Chelating Ligands
66%
Water Vapor
33%
Acetylacetone
33%
Phase-pure
33%
Crack-free
33%
Perovskite
33%
Thermal Process
33%
Ferroelectric Materials
33%
Metal Technology
33%
Lead Zirconate Titanate
33%
PZT Film
33%
Chelation
33%
Volatility
33%
Interfacial Reaction
33%
Thermal Processing
33%
Thermodynamic Equilibrium
33%
Processing Constraints
33%
Oxide Film
33%
Solution Process
33%
Process Window
33%
Chemical Solution
33%
Organic Content
33%
Sol-gel Film
33%
Solution Processing
33%
Confined Conditions
33%
Process Atmosphere
33%
Alkanolamine Solution
33%
Alkanolamine
33%
Atmospheric Processing
33%
Ceramic Film
33%
Gel Network
33%
Material Science
Film
100%
Thin Films
100%
Sol-Gel
100%
Solution Chemistry
100%
Ferroelectric Material
33%
Sol-Gel Processing
33%
Lead Zirconate Titanate
33%
Oxide Film
33%
Solution (Chemistry)
33%
Water Vapor
33%