TY - GEN
T1 - Improvement of hydrogen detection limit for quadruple SIMS tool
AU - Zhang, Z.
AU - Hengstebeck, B.
AU - Stevie, F. A.
AU - Hopstaken, M.
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/6/13
Y1 - 2016/6/13
N2 - Hydrogen is an element of significant interest for semiconductor process; however it cannot be detected by many available elemental analysis techniques. Secondary ion mass spectrometry (SIMS) is one of the few techniques for the measurement of hydrogen amount and depth distribution. Among all kinds of SIMS tools, magnetic sector, quadrupole and time-of-flight, quadrupole SIMS instrument usually has lowest vacuum pressure and therefore should have better hydrogen detection limit. But high blast-through noise from mass 0 to mass 1 significantly affects the hydrogen detection limit. Various methods to improve hydrogen detection limit were investigated in this study. With field axis potential bias and higher mass edge measurement, hydrogen detection limit of quadrupole SIMS tool was improved by one order of magnitude to 2.2×1018 atoms/cm3.
AB - Hydrogen is an element of significant interest for semiconductor process; however it cannot be detected by many available elemental analysis techniques. Secondary ion mass spectrometry (SIMS) is one of the few techniques for the measurement of hydrogen amount and depth distribution. Among all kinds of SIMS tools, magnetic sector, quadrupole and time-of-flight, quadrupole SIMS instrument usually has lowest vacuum pressure and therefore should have better hydrogen detection limit. But high blast-through noise from mass 0 to mass 1 significantly affects the hydrogen detection limit. Various methods to improve hydrogen detection limit were investigated in this study. With field axis potential bias and higher mass edge measurement, hydrogen detection limit of quadrupole SIMS tool was improved by one order of magnitude to 2.2×1018 atoms/cm3.
UR - http://www.scopus.com/inward/record.url?scp=84979561738&partnerID=8YFLogxK
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U2 - 10.1109/ASMC.2016.7491119
DO - 10.1109/ASMC.2016.7491119
M3 - Conference contribution
AN - SCOPUS:84979561738
T3 - 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016
SP - 172
EP - 175
BT - 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016
Y2 - 16 May 2016 through 19 May 2016
ER -