Improvement of the elastic modulus of micromachined structures using carbon nanotubes

Prasoon Joshi; Abhijat Goyal; Awnish Gupta; Srinivas A. Tadigadapa; Peter C. Eklund

doi:10.1117/12.657674

Improvement of the elastic modulus of micromachined structures using carbon nanotubes

Prasoon Joshi, Abhijat Goyal, Awnish Gupta, Srinivas A. Tadigadapa, Peter C. Eklund

Materials Research Institute (MRI)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

It has been shown that the addition of single walled carbon nanotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ∼25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (∼1TPa) of the carbon nanotubes.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.657674
State	Published - May 4 2006
Event	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - San Jose, CA, United States Duration: Jan 25 2006 → Jan 26 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6111
ISSN (Print)	0277-786X

Other

Other	Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Country/Territory	United States
City	San Jose, CA
Period	1/25/06 → 1/26/06

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.657674

Cite this

Joshi, P., Goyal, A., Gupta, A., Tadigadapa, S. A., & Eklund, P. C. (2006). Improvement of the elastic modulus of micromachined structures using carbon nanotubes. In Proceedings of SPIE - The International Society for Optical Engineering Article 611107 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6111). https://doi.org/10.1117/12.657674

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title = "Improvement of the elastic modulus of micromachined structures using carbon nanotubes",

abstract = "It has been shown that the addition of single walled carbon nanotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ∼25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (∼1TPa) of the carbon nanotubes.",

author = "Prasoon Joshi and Abhijat Goyal and Awnish Gupta and Tadigadapa, {Srinivas A.} and Eklund, {Peter C.}",

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isbn = "0819461539",

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Joshi, P, Goyal, A, Gupta, A, Tadigadapa, SA & Eklund, PC 2006, Improvement of the elastic modulus of micromachined structures using carbon nanotubes. in Proceedings of SPIE - The International Society for Optical Engineering., 611107, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, San Jose, CA, United States, 1/25/06. https://doi.org/10.1117/12.657674

Improvement of the elastic modulus of micromachined structures using carbon nanotubes. / Joshi, Prasoon; Goyal, Abhijat; Gupta, Awnish et al.
Proceedings of SPIE - The International Society for Optical Engineering. 2006. 611107 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6111).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Improvement of the elastic modulus of micromachined structures using carbon nanotubes

AU - Joshi, Prasoon

AU - Goyal, Abhijat

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AU - Eklund, Peter C.

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AB - It has been shown that the addition of single walled carbon nanotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ∼25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (∼1TPa) of the carbon nanotubes.

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Improvement of the elastic modulus of micromachined structures using carbon nanotubes

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