TY - JOUR
T1 - Improvements in SIMS continue. Is the end in sight?
AU - Winograd, Nicholas
AU - Postawa, Zbigniew
AU - Cheng, Juan
AU - Szakal, Christopher
AU - Kozole, Joseph
AU - Garrison, Barbara J.
N1 - Funding Information:
The authors acknowledge the National Institutes of Health and the National Science Foundation for partial financial support of this work.
PY - 2006/7/30
Y1 - 2006/7/30
N2 - Cluster ion bombardment is at the forefront of current ToF-SIMS research, particularly when examining the feasibility of molecular depth profiling and three-dimensional imaging applications. It has become increasingly clear that secondary ion emission after cluster projectile impact results from a radically different sputtering mechanism than the linear collision cascades that dominate after atomic ion bombardment. The new physics involved with cluster ion impacts dramatically change the traditional approaches toward sample analysis with the SIMS technique. Several new ion bombardment properties have emerged from experimental and theoretical work involving cluster ions such as Au 3 + , Bi 3 + , SF 5 + , and C 60 + -all of which are commercially available ion sources. These new properties lead to new rules for traditional static SIMS experiments, provoking new methodologies, and introducing new applications-especially where high mass sensitivity and high-resolution imaging of organic and biological materials are necessary. This paper aims to elucidate recent experimental and theoretical work on these new cluster ion properties and offers insights into how these special properties can be used for future experiments and applications.
AB - Cluster ion bombardment is at the forefront of current ToF-SIMS research, particularly when examining the feasibility of molecular depth profiling and three-dimensional imaging applications. It has become increasingly clear that secondary ion emission after cluster projectile impact results from a radically different sputtering mechanism than the linear collision cascades that dominate after atomic ion bombardment. The new physics involved with cluster ion impacts dramatically change the traditional approaches toward sample analysis with the SIMS technique. Several new ion bombardment properties have emerged from experimental and theoretical work involving cluster ions such as Au 3 + , Bi 3 + , SF 5 + , and C 60 + -all of which are commercially available ion sources. These new properties lead to new rules for traditional static SIMS experiments, provoking new methodologies, and introducing new applications-especially where high mass sensitivity and high-resolution imaging of organic and biological materials are necessary. This paper aims to elucidate recent experimental and theoretical work on these new cluster ion properties and offers insights into how these special properties can be used for future experiments and applications.
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U2 - 10.1016/j.apsusc.2006.02.142
DO - 10.1016/j.apsusc.2006.02.142
M3 - Article
AN - SCOPUS:33747180853
SN - 0169-4332
VL - 252
SP - 6836
EP - 6843
JO - Applied Surface Science
JF - Applied Surface Science
IS - 19
ER -